The ULFC Mass Flow Meter is engineered for high-precision measurement and control of low gas flow rates in industrial and laboratory applications. Designed to handle non-corrosive gases, this compact and efficient device ensures accurate monitoring and stable process control. Its advanced sensing capability and integrated control options make it ideal for systems requiring consistent gas flow regulation with minimal fluctuation.
Key Features
- High accuracy for low flow gas measurement
- Supports multiple output signals (0–5 VDC / 4–20 mA)
- Integrated set-point control functionality
- Compact design with reliable electromagnetic valve
- Compatible with various power supply options
- Stable performance for sensitive applications
Application
The ULFC mass flow meter is widely used in semiconductor processes, laboratory gas analysis, environmental monitoring systems, and industrial automation setups. It is particularly effective in applications where precise low flow control is critical, such as calibration systems, gas mixing, and leak detection processes.
Design & Functionality
Built with a streamlined structure, the ULFC integrates flow sensing and control into a single unit. Its electromagnetic normally closed valve ensures safe operation and precise control response. The device supports both integral control and external signal input, allowing flexibility in automated systems.
Total Crossed Beams
The internal sensing mechanism ensures consistent measurement by maintaining stable signal detection across varying flow conditions, enhancing reliability in low flow environments.
Beam Pitch Options
Optimized internal calibration allows accurate measurement across a wide range—from SCCM to SLM—ensuring adaptability across different operational requirements.
Intrinsic Synchronism
The ULFC ensures synchronized measurement and control, reducing lag and improving responsiveness in dynamic systems.
Operational Advantages
- Reduces gas consumption and operational cost
- Enhances process repeatability and stability
- Supports automation with reliable signal output
- Minimizes errors in low flow measurement
